Advanced Energy to Debut Aera(R) PI-980(TM) Series Pressure-Insensitive MFC for Advanced Processes at SEMICON West 2005
07 Julho 2005 - 9:00AM
PR Newswire (US)
Advanced Energy to Debut Aera(R) PI-980(TM) Series
Pressure-Insensitive MFC for Advanced Processes at SEMICON West
2005 AE Also Showcasing Litmas(TM) RPS 1501 and 3001 Remote Plasma
Source Platform, Summit(TM) Specialized DC Power System and
Navigator(TM) Digital Matching Network FORT COLLINS, Colo., July 7
/PRNewswire-FirstCall/ -- Advanced Energy Industries, Inc.
(NASDAQ:AEISE) today announced that it will debut its Aera(R)
PI-980(TM) series pressure-insensitive mass flow controller (MFC)
during SEMICON West 2005. The company also will feature its
Litmas(TM) RPS 1501 and 3001 remote plasma source platform, the
Summit(TM) specialized DC power system and Navigator(TM) digital
matching network at the exposition, held July 12-14 at San
Francisco's Moscone Center. (Logo:
http://www.newscom.com/cgi-bin/prnh/20030825/AEISLOGO ) The new
Aera PI-980 series pressure-insensitive MFC delivers greater flow
stability, faster response, higher accuracy and superior real-time
process control than previous technologies or competitive products.
The PI-980 series is especially well-suited for etch, CVD, PVD and
diffusion applications. Its superior gas-flow stability delivers
greater chamber-to-chamber process repeatability for improved
production yields. The advanced design integrates traditional
thermal flow architecture with a pressure sensor, pressure display,
temperature sensor, and NeuralStep(TM) control technology, creating
a single delivery package and eliminating the need for the costly
gas-panel components traditionally used to perform the same
function. Also showcased this year in AE's booth #2202 will be the
Litmas RPS integrated plasma source and power-delivery system. The
Litmas RPS is well- suited to deliver reactive gas specie fluxes
for process applications such as wafer pre-clean, photoresist strip
and thin-film deposition. Its small footprint, high performance,
ease of use and low cost of ownership allow process engineers to
focus on developing critical plasma-based processes with lower
device damage, higher throughput and higher yields. In addition, AE
will feature the newly-introduced Summit DC power supply that
enables higher yields, increased throughput and a new level of
process flexibility for sub-65 nm semiconductor, including the most
demanding Generation 7 and 8 flat panel display (FPD) applications.
The Summit power system delivers state-of-the-science arc
management as well as exceptional power repeatability and precision
to achieve the tight plasma process control for consistently high
yields. Also exhibited at the show will be the Navigator digital
matching network, which provides advanced match technology for
rapid, accurate and reliable matching across a wide range of load
impedances. Equipped with microprocessor-controlled stepper motor
circuitry and digital, user-selectable tuning algorithms, the
Navigator matching network minimizes reflected power by
automatically tuning the complex impedance of a coupled plasma. An
optional, internal Z'Scan(R) RF sensor allows real-time measurement
and analysis of process power and impendence, providing the ability
to identify and significantly reduce process variability. To learn
more about AE's products during SEMICON West, July 12-14, visit
their booth #2202 in the south hall at the Moscone Convention
Center in San Francisco. Editors interested in meeting with AE
during the show may contact Angie Kellen by phone at: (650)
968-8900 x120, or email: . About Advanced Energy Advanced Energy is
a global leader in the development and support of technologies
critical to high-technology manufacturing processes used in the
production of semiconductors, flat panel displays, data storage
products, compact discs, digital video discs, architectural glass
and other advanced product applications. Leveraging a diverse
product portfolio and technology leadership, AE creates solutions
that maximize process impact, improve productivity and lower cost
of ownership for its customers. This portfolio includes a
comprehensive line of technology solutions in power, flow
management, thermal instrumentation and plasma and ion beam sources
for original equipment manufacturers (OEMs) and end-users around
the world. AE operates in regional centers in North America, Asia
and Europe and offers global sales and support through direct
offices, representatives and distributors. Founded in 1981, AE is a
publicly held company traded on Nasdaq National Market under the
symbol AEISE. More information can be found at
http://www.advanced-energy.com/ Advanced Energy, AE, Aera, PI-980,
NeuralStep, Litmas and Navigator are trademarks of Advanced Energy
Industries, Inc. Visit AE at SEMICON West South Hall Booth #2202
CONTACTS: Marna Shillman Angie Kellen Corporate Communication
Manager Sr. Account Manager Advanced Energy Industries, Inc. MCA
970.407.6280 650.968.8900
http://www.newscom.com/cgi-bin/prnh/20030825/AEISLOGO
http://photoarchive.ap.org/ DATASOURCE: Advanced Energy Industries,
Inc. CONTACT: Marna Shillman, Corporate Communication Manager, of
Advanced Energy Industries, Inc., +1-970-407-6280, ; or Angie
Kellen of MCA, +1-650-968-8900, , for Advanced Energy Industries,
Inc. Web site: http://www.advanced-energy.com/
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