Shipments Support Capacity Expansions at
Multiple Fabs
BEVERLY,
Mass., Dec. 7, 2023 /PRNewswire/ -- Axcelis
Technologies, Inc. (Nasdaq: ACLS), a leading supplier of
innovative, high-productivity solutions for the semiconductor
industry, announced today shipments of the Purion XE™ high energy
and the Purion H™ high current implanters to multiple fabs in Korea
and China to manufacture DRAM
memory devices. The systems include a follow-on shipment to an
existing customer in Korea, and the penetration of a new customer
in China. The systems shipped in
the fourth quarter of 2023.
President and CEO Russell Low
commented, "We're excited to support our existing customers'
capacity expansions and with the new opportunity in China. The Purion H has an innovative high
current implanter architecture, featuring unique scanned spot beam
technology, designed for advanced device applications. Our Purion
XE is the industry standard for today's demanding high energy
recipes. Its unique RF Linear Accelerator (LINAC) technology offers
higher reliability, a wider energy range and greater productivity
than competing platforms, with superior metals contamination
control. The Purion platform offers memory customers unmatched
levels of process control, coupled with market leading throughput
and uniformity, enabling chip manufacturers to achieve greater
yield with the lowest cost of ownership."
About Axcelis:
Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative,
high-productivity solutions for the semiconductor industry for over
40 years. Axcelis is dedicated to developing enabling process
applications through the design, manufacture and complete life
cycle support of ion implantation systems, one of the most critical
and enabling steps in the IC manufacturing process. Learn more
about Axcelis at www.axcelis.com.
CONTACTS:
Maureen Hart (editorial/media)
978.787.4266
Doug Lawson (investor relations)
978.787.9552
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SOURCE Axcelis Technologies, Inc.