BEVERLY,
Mass., July 11, 2023 /PRNewswire/ -- Axcelis
Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling
ion implantation solutions for the semiconductor industry, today
announced multiple shipments of the Purion Power Series™ ion
implanter systems to leading silicon carbide (SiC) power device
chipmakers worldwide. The shipments, all delivered in the second
quarter, included a Purion H200 SiC evaluation system for a leading
SiC power device manufacturer in the
United States as well as multiple revenue systems for
customers in Asia. The models of
Purion Power Series implanters shipped included the Purion H200™
high current, Purion EXE™ high energy, the Purion XE high energy
and the Purion M™ medium current implanters. The systems will be
used in high volume production of power devices supporting
automotive industry electric vehicle (EV) applications. Several of
the systems shipped from the Axcelis Asia Operations Center in
South Korea.
![The Axcelis Purion H200 SiC Power Series high current implanter. The Axcelis Purion H200 SiC Power Series high current implanter.](https://mma.prnewswire.com/media/2150735/Axcelis_Purion_H200_SiC_Power_Series_high_current_implanter.jpg)
President and CEO Russell Low
commented, "The silicon carbide power device market continues to
grow rapidly due to the transition to electric vehicles. This
market is a key driver of our growth. We continue to penetrate new
customers and expand our footprint at existing customers. We expect
greater than 55% of our system revenue in 2023 to come from the
overall power device segment."
Executive Vice President of Marketing and Applications
Greg Redinbo stated, "The Purion
Power Series is the market leader due to its highly differentiated
features and process control capabilities that are enabling for
power device applications. Axcelis is the only ion implant company
that can deliver complete recipe coverage for all power device
applications. The full Purion Power Series family of products
allows customers to optimize their fabs for high volume
manufacturing and to continuously improve their power device
performance."
About Axcelis:
Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative,
high-productivity solutions for the semiconductor industry for over
45 years. Axcelis is dedicated to developing enabling process
applications through the design, manufacture and complete life
cycle support of ion implantation systems, one of the most critical
and enabling steps in the IC manufacturing process. Learn more
about Axcelis at www.axcelis.com.
CONTACTS:
Maureen Hart (editorial/media)
978.787.4266
Doug Lawson (investor relations)
978.787.9552
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SOURCE Axcelis Technologies, Inc.